JPH0412629U - - Google Patents
Info
- Publication number
- JPH0412629U JPH0412629U JP5345390U JP5345390U JPH0412629U JP H0412629 U JPH0412629 U JP H0412629U JP 5345390 U JP5345390 U JP 5345390U JP 5345390 U JP5345390 U JP 5345390U JP H0412629 U JPH0412629 U JP H0412629U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- light shielding
- shielding plate
- exposing
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5345390U JPH0412629U (en]) | 1990-05-22 | 1990-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5345390U JPH0412629U (en]) | 1990-05-22 | 1990-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0412629U true JPH0412629U (en]) | 1992-01-31 |
Family
ID=31574650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5345390U Pending JPH0412629U (en]) | 1990-05-22 | 1990-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0412629U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59134409U (ja) * | 1983-03-01 | 1984-09-08 | 鈴木 弘子 | はと目打ち装置 |
| JP2008258634A (ja) * | 2007-04-05 | 2008-10-23 | Asml Netherlands Bv | 基板をマスクするリソグラフィ装置及び方法 |
-
1990
- 1990-05-22 JP JP5345390U patent/JPH0412629U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59134409U (ja) * | 1983-03-01 | 1984-09-08 | 鈴木 弘子 | はと目打ち装置 |
| JP2008258634A (ja) * | 2007-04-05 | 2008-10-23 | Asml Netherlands Bv | 基板をマスクするリソグラフィ装置及び方法 |